WEB Catalog

Product Information »  WEB Catalog  »  High Vacuum Equipment  »  High Vacuum Valves

High Vacuum Valves

Aluminum High Vacuum Angle Valve XLA/C/F/G

    ・Aluminum bodied
     Uniform baking temperature
     Lightweight, Compact
     Minimal outgassing
     Minimal contamination from heavy metals
    ・Bellows are replaceable.
Series Actuation Valve
type
Shaft seal
type
Application Flange
size
XLA-2 Air
operated
Single
acting
(N.C.)
Bellows seal Dust free,
Cleaned
16 to 80
XLAV-2
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows seal Dust free,
Cleaned
16 to 80
XLC-2 Air
operated
Double
acting
Bellows seal Dust free,
Cleaned
16 to 80
XLF-2 Air
operated
Single
acting
(N.C.)
O-ring seal High-speed operation,
High operating cycles
16 to 80
XLFV-2
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
O-ring seal High-speed operation,
High operating cycles
16 to 80
XLG -2 Air
operated
Double
acting
O-ring seal High-speed operation,
High operating cycles
16 to 80

Features

■Aluminum High Vacuum Angle Valve
■Aluminum bodied

Uniform baking temperature

Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.


Lightweight, Compact

Large conductance, small body, excellent resistance against fluorine corrosion (body)

Low outgassing

Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.

Little heavy metal contamination

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

■Possible to replace the bellows
(Bellows seal type)

Bellows assembly can be replaced which reduces maintenance costs and waste materials.

■A model with a solenoid valve has been added. New



■A heat-resistant 2-color indicator solid state auto switch is available for models with a heater. (Option) New

・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator

■Heater is available for option.


For 100/120° C

■Auto switches are mountable from 4 directions.


■High Vacuum Angle Valve Series Variations

Go Top

Go Top