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High Vacuum Valves
High Vacuum Valves
Aluminum High Vacuum Angle Valve XLA/C/F/G
![](/assets/images/upfiles/etc/series/img1-img1-img1-XL-ACFG.jpg)
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・Aluminum bodied
Uniform baking temperature
Lightweight, Compact
Minimal outgassing
Minimal contamination from heavy metals
・Bellows are replaceable.
Series | Actuation | Valve type |
Shaft seal type |
Application | Flange size |
---|---|---|---|---|---|
XLA-2 | Air operated |
Single acting (N.C.) |
Bellows seal | Dust free, Cleaned |
16 to 80 |
XLAV-2 (With solenoid valve) |
Air operated |
Single acting (N.C.) |
Bellows seal | Dust free, Cleaned |
16 to 80 |
XLC-2 | Air operated |
Double acting |
Bellows seal | Dust free, Cleaned |
16 to 80 |
XLF-2 | Air operated |
Single acting (N.C.) |
O-ring seal | High-speed operation, High operating cycles |
16 to 80 |
XLFV-2 (With solenoid valve) |
Air operated |
Single acting (N.C.) |
O-ring seal | High-speed operation, High operating cycles |
16 to 80 |
XLG -2 | Air operated |
Double acting |
O-ring seal | High-speed operation, High operating cycles |
16 to 80 |
Features
■Aluminum bodied
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
![](/assets/images/newproducts/xla/02.jpg)
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
![](/assets/images/newproducts/xla/03.jpg)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.